Capacitive pressure sensor having encapsulated resonating...

G - Physics – 01 – L

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G01L 7/08 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2381494

A capacitive pressure sensor (100) includes a capacitive plate (116) disposed adjacent to the elastic member (102) so as to define a gap (126) between a planar conductive surface of the elastic member and a corresponding planar surface of the capacitive plate (116). The gap (126), capacitive plate (116) and elastic member (102) together define a capacitor having a characteristic capacitance. The sensor (100) further includes an elongated electrical conductor (120) characterized by an associated inductance value. The gap (126) between the capacitive plate (116) and the elastic member (102) varies as a predetermined function of the pressure applied to the elastic member (102) so as to vary the capacitance. The capacitor (130) and the electrical conductor (120) together form an electrical resonator having a characteristic resonant frequency. Thus, the resonant frequency of the tank circuit is indicative of the pressure applied to the elastic member.

L'invention concerne un capteur de pression (100) capacitif comprenant une plaque capacitive (116) placée de manière adjacente à un élément élastique (102), de façon à définir un espace (126) entre une surface conductrice plane de l'élément élastique et une surface plane correspondante de la plaque capacitive (116). L'espace (126), la plaque capacitive (116) et l'élément élastique (102) définissent ensemble un condensateur présentant une capacité caractéristique. Le capteur (100) comprend en outre un conducteur (120) électrique allongé caractérisé par une valeur d'inductance associée. L'espace (126) entre la plaque capacitive (116) et l'élément élastique (102) varie dans une mesure prédéterminée en fonction de la pression appliquée à l'élément élastique (102) de manière à faire varier la capacité. Le condensateur (130) et le conducteur électrique (120) forment ensemble un résonateur électrique présentant une fréquence de résonance caractéristique. De cette manière, la fréquence de résonance du circuit résonant parallèle indique la pression appliquée à l'élément élastique.

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