Capacitive pressure sensor with encircling third plate

Details Capacitive pressure sensor with encircling third plate Capacitive pressure sensor with encircling third plate

G - Physics

01

L

73/3

G01L 1/14 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2006672

A pressure sensor (210) utilizing capacitance variations to sense pressure variations of the silicon- glass-silicon type (Fig. 3) including a conductive silicon substrate (212), a conductive silicon diaphragm (211) and a glass dielectric layer (213) therebetween forming a spacing wall (216) between them, in which dielectric drift and parasitic (non-pressure sensitive) capacitance is minimized by including a very thin, third, symmetrical, silicon, capacitive plate (220) in the glass wall (216). The third conductive plate encircles the central region (Cc) of the sensor and is located outside of it. Improved assembly techniques, including all symmetrical planar layers, for higher manufacturing yield and better long term reliability are also disclosed.

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