Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

G - Physics

01

L

73/3

G01L 1/04 (2006.01) G01D 5/241 (2006.01) G01L 1/14 (2006.01) G01L 9/00 (2006.01) H04R 19/04 (2006.01)

Patent

CA 1144387

ABSTRACT A capacitive pressure transducer (70) having a first flexible electrically insulative diaphragm (72) disposed apart from a second electrically insulative member (74), including a second flexible diaphragm, and where the diaphragm and member include metalized portions (72, 74, 76) thereon forming the plates of a pressure sensing capacitor. The transducer further includes a pair of electrically insulative sealing rings (100, 102) disposed concentrically about one another which function to space said diaphragm and member apart and which form a hermetically sealed cavity therebetween, to establish the pressure sensitive region of the diaphragm and to reduce the tensile forces in the inner most sealing ring.

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