Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

G - Physics

01

L

G01L 9/12 (2006.01) G01L 9/00 (2006.01) G01L 19/06 (2006.01)

Patent

CA 2203975

A capacitive pressure transducer comprising a first capacitor having a plate which is movable under the influence of pressure and a fixed plate, and a second capacitor having a pair of fixed plates, one plate of the second capacitor and the fixed plate of the first capacitor being fixed to a common support, a first structure for moving the movable plate, a support structure for a second plate of the second capacitor, masses of the support structure for the second plate and of the first structure for moving the movable plate being approximately equal.

Le présent brevet vise un capteur de pression capacitif composé d'une première capacité munie d'une plaque qui peut bouger sous l'effet d'une pression et d'une plaque fixe, et d'une seconde capacité dotée de deux plaques fixes, une plaque de la deuxième capacité et la plaque fixe de la première capacité étant liées au même support, d'une première structure pour déplacer la plaque mobile, d'un élément support pour la deuxième plaque de la seconde capacité, les masses de l'élément support de la seconde plaque et de la première structure commandant le déplacement de la plaque mobile étant à peu près équivalentes.

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