Capacitive pressure transducer with isolated sensing diaphragm

Details Capacitive pressure transducer with isolated sensing diaphragm Capacitive pressure transducer with isolated sensing diaphragm

G - Physics

01

L

73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1164240

CAPACITIVE PRESSURE TRANSDUCER WITH ISOLATED SENSING DIAPHRAGM ABSTRACT OF THE DISCLOSURE A capacitance transducer has a central chamber with a conductive diaphragm disposed therein to separate the chamber into at least two portions, at least one portion having an electrical conductor disposed thereon to form in combination with the diaphragm at least one variable sensor capacitor, and wherein at least one portion of the chamber is coupled by a passageway to communicate with an isolator having an isolator chamber and an isolator diaphragm which in combination with the conductive diaphragm enclose a substantially incompressible fluid such that when pressure is applied to an exposed side of the isolation diaphragm, the conductive diaphragm is urged to deflect and thus change the sensor capacitance. Configuration of the isolators, spaced from the sensor capacitors, and other factors disclosed herein, eliminate unwanted mechanical and thermal stresses thereby improving the capacitive sensors' response to pressure.

387283

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