Capacitive sensing employing thin film inductors

Details Capacitive sensing employing thin film inductors Capacitive sensing employing thin film inductors

G - Physics

11

B

324/44, 352/29.0

G11B 5/127 (2006.01) G01D 5/24 (2006.01) G01H 11/06 (2006.01) G11B 5/31 (2006.01) G11B 5/48 (2006.01) G11B 5/58 (2006.01) G11B 5/596 (2006.01) G11B 9/07 (2006.01)

Patent

CA 1232352

CAPACITIVE SENSING EMPLOYING THIN FILM INDUCTORS ABSTRACT A capacitive variation sensor includes one or more elements providing inductive reactance in the form of thin film coils. This enables a capacitive variation sensor to be integrated on a substrate along with a thin film magnetic read/write head. One element of the capacitive variation sensor is a sensing electrode, and in some embodiments of the invention a dedicated sense electrode can be eliminated by employing the pole tips of the thin film magnetic read/- write head as the sense electrode.

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