Capacitive temperature and pressure transducer

Details Capacitive temperature and pressure transducer Capacitive temperature and pressure transducer

G - Physics

01

L

G01L 9/12 (2006.01) G01K 7/34 (2006.01) G01L 9/00 (2006.01) G01L 13/06 (2006.01) G01L 19/00 (2006.01) G01L 19/04 (2006.01)

Patent

CA 2183896

A monolithic temperature and pressure transducer having a plurality of capacitive sensors. The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients.

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