Capacitive type pressure transducer with flexible diaphragm

G - Physics – 01 – L

Patent

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Details

340/141, 73/3

G01L 19/14 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1010675

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