Cascaded inert gas purging system

Details Cascaded inert gas purging system Cascaded inert gas purging system

H - Electricity

05

K

H05K 7/00 (2006.01) G01R 31/00 (2006.01) H02B 1/28 (2006.01) H05K 7/20 (2006.01)

Patent

CA 2440729

The present invention is a system for protecting, for example, electronic, mechanical, or other components from contamination in a processing environment and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.

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