Casting of high purity oxygen free copper

B - Operations – Transporting – 22 – D

Patent

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Details

B22D 7/10 (2006.01) B22D 7/00 (2006.01) B22D 23/00 (2006.01) B22D 27/04 (2006.01) B22D 27/06 (2006.01)

Patent

CA 2367436

A method and apparatus are provided for making high purity and preferably oxygen free substantially void free and inclusion free copper castings, useful to make sputtering targets. The method comprises melting high purity copper in a covered crucible (17) provided with a reducing gas and insulation, using a coil induction fournace (11). The furnace and crucible, which is disposed between the coil of the furnace and contains molten copper, are positioned above a cooling jacket (23) and the crucible passed continuously downwardly through the opening (27) in the cooling jacket cooling the lower portion of the crucible. A reduced heat is maintained in the furnace to heat the upper poriton of the crucible within the coil and maintain a layer of molten copper over the copper solidifying in the lower portion.

L'invention porte sur un procédé et un appareil de fabrication de moulages en cuivre exempts d'inclusions et de vides, et de préférence exempts d'oxygène, extrêmement purs, et utilisés pour fabriquer des cibles de pulvérisation. Ce procédé consiste à faire fondre du cuivre de haute pureté dans un creuset (17) fermé, constitué d'un gaz réducteur et d'un isolant, dans un four (11) à bobine d'inductance. Le four avec le creuset, placé entre la bobine d'inductance du four et contenant le cuivre fondu, sont placés au-dessus d'une chemise de refroidissement (23),et le creuset descend en continu dans l'orifice (27) de la chemise de refroidissement de sorte que sa partie inférieure soit refroidie. Une chaleur réduite est maintenue dans le four de façon à chauffer la partie supérieure du creuset à l'intérieur de la bobine et à conserver une couche de cuivre fondue sur le cuivre se solidifiant dans la partie inférieure.

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