Cathode evaporating device

Details Cathode evaporating device Cathode evaporating device

C - Chemistry, Metallurgy

23

C

313/167

C23C 14/32 (2006.01)

Patent

CA 1296050

Abstract Cathode arc discharge evaporating device having a body of revolution ascathode. The target surface is arranged at the outside surface of the body of revolution. To control movement of the arc spot a magnetic field generating device is provided inside the body of revolution, which may be moveable with respect to the cathode.

561379

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