Cathode sputtering apparatus for the two faces of a large...

Details Cathode sputtering apparatus for the two faces of a large... Cathode sputtering apparatus for the two faces of a large...

H - Electricity

01

M

204/167.3

H01M 4/88 (2006.01) C23C 14/35 (2006.01) H01J 37/34 (2006.01)

Patent

CA 994708

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