Cathodes for sputter-coating glass sheets or other substrates

Details Cathodes for sputter-coating glass sheets or other substrates Cathodes for sputter-coating glass sheets or other substrates

C - Chemistry, Metallurgy

23

C

204/167.3

C23C 15/00 (1980.01)

Patent

CA 1092057

ABSTRACT A cathode for use in the sputter-coating of thin films of a selected coating material on glass sheets or other substrates. The cathode id of rectangular boxlike construct- ion having a closed chamber therein containing a plurality of spaced partitions arranged to form a serpentine passageway through which a cooling medium is circulated. The side and end walls of the cathode defining the closed chamber extend above the top wall of said chamber and are provided with out- wardly directed flanges which form a continuous rim for support- ing the cathode in operative position in the coating apparatus.

243541

Affiliated with

Also associated with

Rating

Cathodes for sputter-coating glass sheets or other substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cathodes for sputter-coating glass sheets or other substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cathodes for sputter-coating glass sheets or other substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-377141