Ceramic susceptor

Details Ceramic susceptor Ceramic susceptor

H - Electricity

05

B

H05B 3/10 (2006.01) H01L 21/00 (2006.01) H05B 3/14 (2006.01)

Patent

CA 2424507

Ceramic susceptor whose wafer-retaining face has superior isothermal properties, and that is suited to utilization in apparatuses for manufacturing semiconductors and in liquid-crystal manufacturing apparatuses. In plate- shaped sintered ceramic body 1, resistive heating element 2 is formed. Fluctuation in pullback length L between sintered ceramic body outer- peripheral edge 1a and resistive heating element substantive-domain outer- peripheral edge 2a is within ~0.8%, while isothermal rating of the entire surface of the wafer-retaining face is ~1.0% or less. Preferable is a superior isothermal rating of ~0.5% or less that can be achieved by bringing the fluctuation in pullback length L to within ~0.5%.

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