Cerium oxide abrasive and method of abrading substrates

Details Cerium oxide abrasive and method of abrading substrates Cerium oxide abrasive and method of abrading substrates

H - Electricity

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H01L 21/304 (2006.01) B24B 37/00 (2006.01) C09G 1/02 (2006.01) C09K 3/14 (2006.01) H01L 21/3105 (2006.01) H01L 21/321 (2006.01)

Patent

CA 2263241

A cerium oxide abrasive for abrading surfaces of an SiO2 insulating film or the like film without causing defects and at high speeds. The abrasive includes a slurry obtained by dispersing, in a medium, the cerium oxide particles having diameters of primary particles of from to 600 nm, a median value of 30 to 250 nm, a median value of particle diameters of 150 to 600 nm, and a maximum diameter of not larger than 3000 nm.

L'invention concerne un abrasif à l'oxyde de cérium pour l'abrasion à grande vitesse et sans défaut de surfaces d'un film isolant en SiO2 ou similaire. Ledit abrasif comprend une boue produite par dispersion, dans un milieu, de particules d'oxyde de cérium dont le diamètre des particules primaires est de 10 à 600 nm, en moyenne de 30 à 250 nm, le diamètre moyen des particules étant de 150 à 600 nm et d'au plus 3000 nm.

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