Charge-giving body, and pattern-formed body using the same

Details Charge-giving body, and pattern-formed body using the same Charge-giving body, and pattern-formed body using the same

H - Electricity

01

L

H01L 29/34 (2006.01) B32B 3/00 (2006.01) B32B 9/00 (2006.01)

Patent

CA 2413666

A main object of the present invention is to provide a charge-giving body capable of forming a pattern having a minute structure on a surface of a semiconductor by a simple process; and a minute pattern-formed body. The present invention is a charge-giving body, comprising a defected region in which defect is introduced into a crystal structure in a crystalline semiconductor surface, charge being given from the defected region.

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