Charge storage type semiconductor device and method for...

Details Charge storage type semiconductor device and method for... Charge storage type semiconductor device and method for...

G - Physics

11

C

356/197, 352/82.

G11C 11/34 (2006.01) H01L 21/20 (2006.01)

Patent

CA 1149952

- 18 - Abstract of the Disclosure A charge storage type semiconductor device comprising a semiconductor substrate and means for accu- mulating charge in those portions of the substrate which are located in the vicinity of one of the major surfaces of the substrate. The substrate has a defect region of a high defect density and at least one defect free region having no crystal defects or a low defect density and formed in the vicinity of at least the major surface of the substrate. The defect region prevents unne- cessary minority carriers from flowing into charge storage regions.

356652

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