Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

H - Electricity

01

J

358/25

H01J 33/02 (2006.01) G21K 1/087 (2006.01) H01J 3/12 (2006.01) H01J 37/063 (2006.01) H01J 37/08 (2006.01)

Patent

CA 1059656

Abstract A charged particle beam (e.g., ions or elec- trons) apparatus including two electrostatic focusing lenses and an electrode having a diameter limiting aperture positioned between the lenses is further pro- vided with two electrode assemblies which interact with an extractor electrode and with a source of charged particles such that the trajectories of the particles in the beam passing through the second of the two assemblies are substantially parallel. This feature and other disclosed improvements facilitate the pro- duction of a substantially monoenergetic beam which under a first set of conditions can be focused to provide a small-diameter, spherical-aberration limited beam and which under another set of conditions, can be focused to provide a high current beam.

245963

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