Charged particle beam scanning apparatus

Details Charged particle beam scanning apparatus Charged particle beam scanning apparatus

G - Physics

21

K

358/24

G21K 1/08 (2006.01) A61N 5/10 (2006.01) G21K 1/093 (2006.01)

Patent

CA 1104728

ABSTRACT OF THE DISCLOSURE A charged particle beam scanning apparatus includes a deflector for an electron beam which includes a magnetic field generator to supply a beam of charged particles with a fringing magnetic field whose intensity grows higher in the opposite direction to that in which the beam is deflected.

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