Charged particle beam structure having electrostatic coarse...

Details Charged particle beam structure having electrostatic coarse... Charged particle beam structure having electrostatic coarse...

H - Electricity

01

J

355/13

H01J 29/70 (2006.01) H01J 29/46 (2006.01)

Patent

CA 1161173

ABSTRACT An electron beam or other charged particle beam tube of the compound fly's eye type having a coarse deflection system is described. The beam tube comprises an evacuated housing together with an electron gun or other charged particle beam producing means disposed at one end of the evacuated housing for producing a beam of electrons or other charged particles. A coarse deflector, a compound micro lens assembly, and a fine deflector are disposed in the housing in the path of the electron or other charged particle beam for first selecting a lenslet and thereafter finely deflecting an electron or other charged particle beam to a desired spot on a target plane. The electron or other charged part- icle beam tube is designed in a manner such that the electron or other charged particle beam is caused to diverge at a small angle of divergence in advance of passing through the coarse deflector by appropriately locating the virtual ori- gin or point source of the charged particle a small distance in advance of the coarse deflector. In addition, a dynamic focusing correction potential is sup- plied to the micro lens assembly along with a high voltage energizing potential with the dynamic focusing correction potential being derived from components of both the coarse deflection potentials and the fine deflection potentials.

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