Charged-particle energy analyzer and mass spectrometer...

H - Electricity – 01 – J

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H01J 49/48 (2006.01) H01J 49/02 (2006.01) H01J 49/32 (2006.01)

Patent

CA 2055609

An electrostatic analyzer (1) for dispersing a beam of charged particles (10) according to their energy comprises two groups (2, 3) of spaced-apart linear electrodes (4, 8, 9, 20) respectively disposed above and below the charged particle beam. The potentials of the electrodes (4, 8, 9, 20) in each group progressively increase from one to the next, thereby providing an electrostatic field in a central plane (7) between the groups which is capable of deflecting the charged particles along different curved trajectories (11, 12) according to their energies. Various mass spectrometers incorporating such an analyzer are also disclosed.

Un analyseur électrostatique (1) pour la dispersion d'un faisceau de particules chargées (10) selon leur énergie comprend deux groupes (2, 3) d'électrodes linéaires espacées (4, 8, 9, 20) disposés respectivement au-dessus du faisceau de particules chargées et au-dessous de celui-ci. Les potentiels desdites électrodes (4, 8, 9, 20) dans chaque groupe augmentant progressivement de l'une à l'autre, on réalise ainsi, sur un plan central (7) entre lesdits groupes, un champ électrostatique apte à défléchir les particules chargées sur des trajectoires courbes différentes (11, 12) selon leurs énergies. Des spectromètres de masse divers incorporant un tel analyseur sont également décrits.

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