C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
117/85
C23C 16/40 (2006.01) C03C 17/245 (2006.01) C23C 16/02 (2006.01)
Patent
CA 1261686
IMPROVED CHEMICAL VAPOR DEPOSITION METHOD OF PRODUCING FLUORINE-DOPED TIN OXIDE COATINGS ABSTRACT OF THE DISCLOSURE In accordance with the invention, there is provided herein an improved chemical vapor deposition method for forming fluorine-doped tin oxide coatings using a liquid coating composition which includes a reactive organic fluorine dopant and an organotin compound. The method is carried out under a defined set of process conditions such that the coating produced has a minimum and constant sheet resistance which is substantially independent of deposition temperature. -i-
498567
Atofina Chemicals Inc.
Fetherstonhaugh & Co.
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