Chemical vapor deposition of coatings

Details Chemical vapor deposition of coatings Chemical vapor deposition of coatings

C - Chemistry, Metallurgy

23

C

32/23, 117/81

C23C 16/54 (2006.01) C03C 17/00 (2006.01) C03C 17/245 (2006.01) C23C 16/453 (2006.01)

Patent

CA 1021207

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