Chemical vapor deposition of oxide films containing alkaline...

Details Chemical vapor deposition of oxide films containing alkaline... Chemical vapor deposition of oxide films containing alkaline...

H - Electricity

01

L

117/103, 117/85

H01L 39/24 (2006.01)

Patent

CA 1338202

This invention is a vapor deposition process for making barium or strontium containing ceramic superconduc- tors. It utilizes vaporization of chelates of the metallic constituents of the superconductor at 150-350°C to produce a composite vapor which can be mixed with an oxygen con- taining gas for depositing a very homogeneous ceramic film on a heated substrate. This invention solves the barium and/or strontium source material volatility problem which has generally prevented the chemical vapor deposition of such materials.

589554

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