C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
117/86
C23C 16/44 (2006.01) C23C 16/01 (2006.01) C23C 16/26 (2006.01) C23C 16/30 (2006.01) C23C 16/32 (2006.01) C23C 16/56 (2006.01)
Patent
CA 2027171
ABSTRACT OF THE DISCLOSURE A process is disclosed by which the finish and/or figure of polished preshaped structures (such as mirrors) can be replicated directly by chemical vapor deposition, with only minor polishing of the replica being required to obtain a final product, and with the original substrate being reusable for further replication. Relevant conditions under which the process can be carried out are given. Featured in the process is a pretreatment step prior to the deposition of a layer of silicon carbide to form the replica, which pretreatment step involves the formation on the polished substrate of an oxide layer and a carbon layer of high finish and uniform thickness. The carbon layer allows easy separation of the substrate and replica which otherwise would be bound together.
Keeley Joseph T.
Pickering Michael A.
Taylor Raymond L.
Cvd Inc.
Gowling Lafleur Henderson Llp
LandOfFree
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