Chemical vapor deposition system cleaner

Details Chemical vapor deposition system cleaner Chemical vapor deposition system cleaner

B - Operations, Transporting

08

B

B08B 9/08 (2006.01) B08B 9/093 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2065329

2065329 9103328 PCTABS00003 An apparatus for cleaning the interior surfaces of a vessel (1) which includes a cleaning head (2) supported and guided into the vessel by a rigid air shaft (3). The cleaning head (2) is supplied with a process fluid and directs and removes the process fluid from a cleaning zone located on the interior surface of the vessel (1). The process fluid is heated by a heat exchanger hose assembly (5) that is connected to the air shaft (3). The apparatus utilizes turbulent fluid flow, thermal shock, ultrasonic vibration and/or piezoelectric vibration to dislodge particulates from the inner surfaces of the vessel. The apparatus is useful for cleaning chemical vapor deposition reactors and other similar vessels.

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