Chemical vapour deposition process for depositing a fluor...

C - Chemistry – Metallurgy – 23 – C

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C23C 14/10 (2006.01) C03B 19/14 (2006.01) C03B 37/018 (2006.01) C03C 3/32 (2006.01) C03C 17/02 (2006.01)

Patent

CA 2106419

Procédé de dépôt en phase vapeur d'un film en verre fluoré sur un substrat, selon lequel on met en contact ledit substrat (30) avec des flux de vapeurs des divers constituants dudit verre, caractérisé par le fait que lesdits flux de vapeur (12, 22) sont émis de manière simultanée à partir d'au moins deux creusets (10, 20), un premier creuset (10) contenant un bain d'accueil et les fluorures métalliques de base constituant ledit verre fluoré, et au moins un second creuset (20) contenant des éléments dopants constitués par au moins un halogénure de Terres Rares.

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