Chuck apparatus for clamping a planar substrate in an...

H - Electricity – 02 – N

Patent

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H02N 13/00 (2006.01) B05B 5/08 (2006.01) B05D 1/06 (2006.01) B23B 31/28 (2006.01) H01L 21/683 (2006.01) B05B 5/03 (2006.01)

Patent

CA 2333116

The disclosure relates to an apparatus for electrostatically adhering grains to a planar substrate comprising: a) an electrostatic chuck (10) having a collection surface with at least one grain collection zone for electrostatically directing charged grains to a corresponding surface on the planar substrate; and b) a pattern of holes through the electrostatic chuck (10) allowing a source of vacuum (15) to act through the chuck (10) to adhere the planar substrate.

L'invention concerne un appareil permettant une adhésion électrostatique de grains à un substrat plat, cet appareil comprenant: a) un mandrin électrostatique (10) présentant une surface de captation pourvue d'au moins une zone destinée à capter les grains, pour ensuite permettre une orientation électrostatique de ces grains chargés vers une surface correspondante dudit substrat plat; et b) une combinaison de trous ménagée sur le mandrin électrostatique (10), permettant ainsi à une source de vide (15) d'exercer une force sur ce mandrin (10) pour adhérer au substrat plat.

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