Circuit element with barrier layer for protecting...

B - Operations – Transporting – 32 – B

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B32B 3/02 (2006.01) H01L 39/24 (2006.01)

Patent

CA 1303252

CIRCUIT ELEMENT WITH BARRIER LAYER FOR PROTECTING CRYSTALLINE OXIDE CONDUCTIVE LAYER Abstract of the Disclosure A circuit element is disclosed comprised of a substrate and an electrically conductive layer located on the substrate. The electrically conductive layer is comprised of a crystalline rare earth alkaline earth copper oxide. The substrate is formed of a material which increases the electrical resistance of the conductive layer when in contact with the rare earth alkaline earth copper oxide during crystalli- zation of the latter to an electrically conductive form. A barrier layer is interposed between the electrically conductive layer and the substrate. The barrier layer contains magnesium, a group IVA metal, or a platinum group metal, either in an elemental state or in the form of an oxide or silicide. The circuit element is produced by first forming the barrier layer on the substrate followed by coating conductor precursor metal-ligand compounds of each of rare earth, alkaline earth, and copper containing at least one thermally volatilizable ligand and heating the precursor metal-ligand compounds in the presence of oxygen to produce a crystalline rare earth alkaline earth copper oxide electrically conductive layer.

570776

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