Clean room atmosphere control

Details Clean room atmosphere control Clean room atmosphere control

A - Human Necessities

61

L

A61L 9/14 (2006.01) A61L 9/02 (2006.01) F24F 3/16 (2006.01) F24F 5/00 (2006.01)

Patent

CA 2237838

A method of providing a clean respirable atmosphere in a clean room comprising supplying a liquefied breathable gas from a source thereof, filtering the liquid, vaporising the filtered liquid, filtering the gas and introducing the filtered gas into the clean room.

Méthode pour obtenir de l'air propre respirable, dans une pièce propre, consistant à fournir un gaz liquéfié respirable à partir d'une source de ce gaz, à filtrer le liquide, à vaporiser le liquide filtré, à filtrer le gaz et à introduire le gaz filtré dans la pièce propre.

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