Clean window for processing enclosure

Details Clean window for processing enclosure Clean window for processing enclosure

E - Fixed Constructions

06

B

15/17, 108/33

E06B 7/12 (2006.01) A47L 1/00 (2006.01) B08B 17/02 (2006.01) F27D 21/02 (2006.01) F27D 25/00 (2010.01) F27D 3/16 (2006.01)

Patent

CA 2015524

RD-19,148 CLEAN WINDOW FOR PROCESSING ENCLOSURE ABSTRACT OF THE DISCLOSURE A viewport capable of providing sustained clear viewing is provided. The clear viewing is the result of maintaining a unidirectional flow of purge gas from the lens of the port toward the chamber on which the port is mounted. An annular flow channel surrounding the viewpath distributes purge gas to a porous inner wall of the annular channel. Purge gas passes through the porous inner wall and flows unidirectionally toward the chamber.

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