B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
B05D 1/26 (2006.01) B05C 19/06 (2006.01) B05D 1/18 (2006.01) G03F 7/16 (2006.01) H01L 21/00 (2006.01) H01L 21/77 (2006.01)
Patent
CA 2270807
The described invention provides a method and apparatus for coating uniform films on substrates and curing the coatings on the surface. Within an enclosed chamber the object to be coated is positioned and a sufficient amount of liquid material is provided into the chamber to cover the surface of the object to be coated. The excess liquid material is then evacuated from the chamber at a controlled rate to leave a coating of material on the surface of the object.
Beaumont Guy D.
Caron Germain L.
Robillard Francois P.
Barrett B.p.
Beaumont Guy D.
Caron Germain L.
Ibm Canada Limited - Ibm Canada Limitee
Robillard Francois P.
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