Closed-loop capacitive accelerometer with spring constraint

Details Closed-loop capacitive accelerometer with spring constraint Closed-loop capacitive accelerometer with spring constraint

G - Physics

01

P

73/3, 73/42

G01P 15/00 (2006.01) G01P 1/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01) G01P 15/13 (2006.01)

Patent

CA 2010369

Abstract of the Disclosure Closed-Loop Capacitive Accelerometer With Spring Constraint A micromachined three-plate capacitive accelerometer incorporates hinges a attach-d to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration. R-3333 - 16 -

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