Cmp slurry containing a solid catalyst

Details Cmp slurry containing a solid catalyst Cmp slurry containing a solid catalyst

C - Chemistry, Metallurgy

09

G

C09G 1/02 (2006.01) B24B 37/04 (2006.01) C09K 3/14 (2006.01) C23F 3/00 (2006.01) H01L 21/321 (2006.01)

Patent

CA 2336482

A chemical mechanical polishing composition comprising an oxidizing agent and at least one solid catalyst, the composition being useful when combined with an abrasive or with an abrasive pad to remove multiple metal layers from a substrate.

L'invention concerne une composition de polissage mécanique-chimique contenant un comburant et au moins un catalyseur solide. Cette composition est utile lorsqu'elle est associée à un abrasif ou à un tampon abrasif pour éliminer des couches métalliques multiples d'un substrat.

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