Coating a substrate surface with a permeation barrier

C - Chemistry – Metallurgy – 23 – C

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C23C 14/30 (2006.01) B65D 65/40 (2006.01) C23C 14/08 (2006.01) C23C 14/10 (2006.01) C23C 14/20 (2006.01) C23C 14/32 (2006.01)

Patent

CA 2084230

A substrate surface is coated with a permeation barrier of inorganic material which is vaporised from a crucible in a vacuum chamber evacuated to at least 10 -3 mbar and precipitated on the substrate surface; an ionising electron beam of low energy is passed through the gas phase of inorganic material with formation of a plasma, preferably in the direction running approximately parallel to the substrate surface; at least one low voltage electron beam gun with assigned electrode is incorporated in the vacuum chamber between the crucible and the substrate support; the main application is for coating plastic films for the packaging industry.

Un subjectile est revêtu d'une barrière de perméance en matériau inorganique, qui est vaporisée à partir d'un creuset dans une chambre sous vide, évacuée à environ 10 -3 mb et précipitée sur la surface du subjectile; un faisceau d'électron ionisant de faible énergie est passé à travers la phase gazeuse du matériau inorganique avec la formation de plasma, préférablement dans une direction approximativement parallèle à la surface du subjectile; au moins un canon électronique à basse tension avec électrode assignée est incorporé dans la chambre sous vide entre le creuset et le subjectile; la principale application sert à la mise en place de films en plastique pour l'industrie de l'emballage.

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