Coating gas generator and method

Details Coating gas generator and method Coating gas generator and method

C - Chemistry, Metallurgy

23

C

C23C 16/44 (2006.01) C23C 16/00 (2006.01) C23C 16/448 (2006.01)

Patent

CA 2401936

Chemical vapor deposition apparatus and method are provided with external metal halide gas generators that reduce leakage of air into the generators so as to improve efficiency of use of the metal charge residing in each generator.

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