Coating method and apparatus

Details Coating method and apparatus Coating method and apparatus

H - Electricity

01

L

356/178, 95/36

H01L 21/70 (2006.01) G03F 7/16 (2006.01) H01L 21/30 (2006.01)

Patent

CA 1152230

ABSTRACT OF THE DISCLOSURE An apparatus and method for coating a substrate with a thin film of material. The coating material is converted to a mist by means of an ultrasonic nebulizer and transported by a carrier gas to a chamber which contains the substrate where the mist is allowed to settle onto the substrate under the force of gravity. Sonic means are also provided to increase the settling rate of the mist droplets to lessen the settling time. Refill chamber means are also provided to maintain the volume and con- centration of the coating material in the nebulizer chamber over successive coatings.

359301

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