H - Electricity – 01 – L
Patent
H - Electricity
01
L
32/83, 117/85
H01L 21/68 (2006.01) C23C 16/455 (2006.01) C23C 16/458 (2006.01) C30B 25/12 (2006.01) C30B 25/14 (2006.01) C30B 31/16 (2006.01) C30B 33/00 (2006.01) C23C 16/44 (2006.01)
Patent
CA 1158109
COATING OF SEMICONDUCTOR WAFERS AND APPARATUS THEREFOR Abstract of the Disclosure In the production of coatings on semiconductor wafers, fragile equipment is used and also difficulties in obtaining uniform coatings arise. The invention provides a form of boat for holding wafers and a manifold structure for feeding gases to the boats, and wafers which are less fragile cheaper and easier to manufacture and give more uniform coatings. The boats are relatively short, of semi-cylindrical form with slots through which gas can flow, and with rails for positioning and holding wafers at correct heights. The manifolds have apertures which are spaced at varying distances along the manifold as compared to the conventional longitudinal slot. The invention is particularly applicable to producing oxide coatings and polycrystalline silicon coatings on silicon wafers.
368517
Jelly Sidney Thomas
Nortel Networks Limited
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