C - Chemistry – Metallurgy – 09 – D
Patent
C - Chemistry, Metallurgy
09
D
117/110, 117/162
C09D 183/05 (2006.01) C04B 41/45 (2006.01) C04B 41/52 (2006.01) C23C 16/30 (2006.01) C23C 28/04 (2006.01) H01L 21/48 (2006.01) H05K 3/28 (2006.01)
Patent
CA 2034908
COATINGS FOR MICROELECTRONIC DEVICES AND SUBSTRATES ABSTRACT The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate, especially electronic devices, as well as the substrate coated thereby. The method comprises coating said substrate with a solution comprising a solvent, hydrogen silsesquioxane resin and a modifying ceramic oxide precursor selected from the group consisting of tantalum oxide precursors, niobium oxide precursors, vanadium oxide precursors, phosphorous oxide precursors and boron oxide precursors. The solvent is then evaporated to thereby deposit a preceramic coating on the substrate. The preceramic coating is then ceramified by heating to a temperature of between about 40°C. and about 1000°C. This coating, moreover, may be covered by additional passivation and barrier coatings.
Dow Corning Corporation
Gowling Lafleur Henderson Llp
Haluska Loren A.
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