Coaxial cavity type, radiofrequency wave, plasma generating...

Details Coaxial cavity type, radiofrequency wave, plasma generating... Coaxial cavity type, radiofrequency wave, plasma generating...

H - Electricity

05

H

358/25

H05H 1/46 (2006.01) C30B 23/02 (2006.01)

Patent

CA 2010245

ABSTRACT OF THE DISCLOSURE A coaxial radiofrequency wave plasma generating apparatus with an elongate metallic cavity (10) having a movable elongate coupling probe (16) mounted in line with an axis (a-a) of the cavity having a central coaxial conductor (11) and having a movable plate (12) for obtaining a mode of resonance of the radiofrequency wave in the cavity surrounding a chamber (14) for confining the plasma (100) is described. An end (11b) of the conductor is adjacent to the chamber and can optionally support a set of magnets (27). The apparatus is particularly useful for retrofitting existing vacuum sources (101) having small inlet ports (105) for plasma treatment using molecular beam epitaxy (MBE).

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