Columnar-grained polycrystalline solar cell and process of...

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H01L 31/028 (2006.01) H01L 31/036 (2006.01) H01L 31/0368 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2107975

The invention relates to techniques for manufacturing columnar-grained polycrystalline sheets which have particular utility as substrates or wafers for solar cells. The sheet is made by applying granular silicon to a setter material which supports the granular material. The setter material and granular silicon are subjected to a thermal profile all of which promote columnar growth by melting the silicon from the top downwardly. The thermal profile sequentially creates a melt region at the top of the granular silicon and then a growth region where both liquid and a growing polycrystalline sheet layer coexist. An annealing region is created whets the temperature of the grown polycrystalline silicon sheet layer is controllably reduced to effect stress relief.

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