Combination micromachine and optical device array

Details Combination micromachine and optical device array Combination micromachine and optical device array

G - Physics

02

B

G02B 26/00 (2006.01) G02B 6/35 (2006.01) G02B 6/43 (2006.01)

Patent

CA 2478238

A unit (600) is made up of an electronic integrated circuit (604), a MEMS device (608), and an active optical device (602), electrically coupled to the electronic integrated circuit and located between the electronic integrated circuit and the MEMS device. The MEMS device is electrically coupled to the electronic integrated circuit and positioned to affect the behavior of light, relative to the active optical device, based upon the position of an element in the MEMS device as controlled by the electronic integrated circuit.

L'invention concerne une unité constituée d'un circuit intégré électronique, d'un dispositif MEMS, et d'un dispositif optique actif couplé par voie électrique audit circuit intégré électronique et situé entre ce dernier et le dispositif MEMS. Ledit dispositif MEMS est couplé par voie électrique audit circuit intégré électronique et est positionné de manière à affecter le comportement de la lumière, par rapport audit dispositif optique actif, en fonction de la position d'un élément situé dans ledit dispositif MEMS tel que commandé par ledit circuit intégré électronique.

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