Combined pumping system comprising a getter pump and an ion...

Details Combined pumping system comprising a getter pump and an ion... Combined pumping system comprising a getter pump and an ion...

H - Electricity

01

J

H01J 41/00 (2006.01)

Patent

CA 2714274

A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.

La présente invention concerne un système de pompage combiné (10) qui comprend une pompe getter (12) et une pompe ionique (13). Les pompes getter et ionique (12, 13) sont montées sur une même bride (11) et sont placées du même côté de la bride (11) en deux points différents.

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