Combined pumping system comprising a getter pump and an ion...

Details Combined pumping system comprising a getter pump and an ion... Combined pumping system comprising a getter pump and an ion...

F - Mech Eng,Light,Heat,Weapons

04

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F04B 37/02 (2006.01) F04B 37/14 (2006.01) H01J 7/18 (2006.01) H01J 41/12 (2006.01)

Patent

CA 2752810

A combined pumping system comprising a getter pump (120; 220) and an ion pump (130; 230) is described. The getter pump and the ion pump (120, 130; 220, 230) are mounted in series on a same flange (111; 211) and respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

Système de pompage combiné comprenant une pompe getter (120 ; 220) et une pompe ionique (130 ; 230). La pompe getter et la pompe ionique (120, 130 ; 220, 230) sont montées en série sur la même bride (111 ; 211) et disposées respectivement sur les côtés opposés de celle-ci de façon à ce que la conductance aussi bien de la pompe getter que de la pompe ionique soit maximisée en direction des sources de flux gazeux dans une chambre sous vide afin d'améliorer le niveau de vide du système.

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