Compact, two-phase charge-coupled-device structure utilizing...

G - Physics – 11 – C

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352/82.22

G11C 11/08 (2006.01) H01L 21/339 (2006.01) H01L 29/423 (2006.01) H01L 29/768 (2006.01)

Patent

CA 1111137

APPLICATION FOR PATENT -of- LLOYD R. WALSH -for- A COMPACT, TWO-PHASE CHARGE-COUPLED-DEVICE STRUCTURE UTILIZING MULTIPLE LAYERS OF CONDUCTIVE MATERIAL ABSTRACT OF THE DISCLOSURE An improved charge-coupled-device gate structure utilizes three depositions of electrically conductive material to form electrodes, thereby allowing fabrication of two-phase CCD gate structures occupying less wafer surface area and operating at faster speeds than conventional charge-coupled-device gate structures. -1-

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