B - Operations – Transporting – 08 – B
Patent
B - Operations, Transporting
08
B
B08B 3/08 (2006.01) C23C 4/00 (2006.01) C23C 14/00 (2006.01) C23C 16/00 (2006.01) H01L 21/00 (2006.01)
Patent
CA 2511832
Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off and/or falling off of a film adhered to the component quite difficult, while the structure permits easy removal of such an adhered film within a short period of time when cleaning the component as sell as a method for cleaning the component. A large number of through holes each extending from the back face to the top face of the component are formed for the penetration of a cleaning solution into the boundary between the component and a film of the film-forming material adhered to the surface of the component and formed during the formation of the foregoing thin film. This easily allows the peeling off and removal of the film adhered to the component within a short period of time as compared when the adhered film is dissolved only from the surface thereof.
L'invention concerne un composant pour dispositif de formation de film permettant de former un film mince sur un substrat au moyen d'une matière de formation de film et possédant une structure telle qu'un film collé peut facilement être retiré en peu de temps lors d'un lavage, même si le composant est formé dans cette structure de surface, de telle façon que le film collé est difficile à endommager et à retirer par pelage. Cette invention a aussi trait à un procédé de lavage du composant. Un nombre important de trous traversants s'étalant de la surface arrière à la surface avant du composant permettent au liquide de lavage de pénétrer dans une surface limite entre le composant dudit dispositif de formation de film et le film collé constitué de la matière de formation de film collé sur la surface du composant, lorsque le film mince est formé. Ainsi, le film collé peut être facilement retiré par pelage du film en un temps plus court qu'au cas où le film collé sur la surface avant ne se dissout qu'avec le liquide de lavage.
Hirata Akisuke
Isoda Shinji
Kadowaki Yutaka
Mushiake Katsuhiko
Mckay-Carey & Company
Ulvac Inc.
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