G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 7/023 (2006.01) G03F 7/022 (2006.01)
Patent
CA 2065478
Abstract of the Disclosure The present invention relates to a radiation- sensitive composition containing a resinous binder which is insoluble in water, but soluble or at least swellable in aqueous alkaline solutions, at least one radiation- sensitive compound and optionally a crosslinking agent. The radiation-sensitive compound is an ester composed of a) a compound containing 2 to 6 aromatic hydroxyl groups, b) a ring-substituted (o-naphthoquinone 2-diazide)-4- sulfonic acid (diazo compound D1) and c) an (o- naphthoquinone 2-diazide)-4- or -5-sulfonic acid which is not further substituted (diazo compound D2) and/or a non- radiation-sensitive organic acid (compound D0), where the D1:(D2 and/or D0) molar ratio is between about 0,1:1 and 30:1.
Buhr Gerhard
Scheler Siegfried
Schmitt Axel
Zahn Wolfgang
Buhr Gerhard
Fetherstonhaugh & Co.
Hoechst Aktiengesellschaft
Scheler Siegfried
Schmitt Axel
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