Composition for vapor deposition, method for forming...

C - Chemistry – Metallurgy – 23 – C

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C23C 16/44 (2006.01) B05D 5/06 (2006.01) B05D 7/24 (2006.01) C23C 14/22 (2006.01) G02B 1/11 (2006.01)

Patent

CA 2360619

It is an object of the invention to provide a method for producing an optical element having a multi-layered antireflection film formed on a synthetic resin substrate, in which the antireflection film formed has good heat resistance, and its heat resistance lowers little with time. The method makes it possible to form high-refraction layers within a shorter period of time, not detracting from the good physical properties intrinsic to the layers. At least one high-refraction layer of the multi-layered anti-reflection film contains niobium oxide, zirconium oxide, yttrium oxide, and optionally aluminum oxide.

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