Compositions for production of electronic coatings

Details Compositions for production of electronic coatings Compositions for production of electronic coatings

C - Chemistry, Metallurgy

08

L

117/104, 400/770

C08L 79/08 (2006.01) B05D 3/12 (2006.01) B05D 5/12 (2006.01)

Patent

CA 2008804

COMPOSITIONS FOR PRODUCTION OF ELECTRONIC COATINGS Abstract of the Disclosure In humid atmospheres (e.g., 40% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexa- fluorbpropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]- hexafluoropropane polyamic acid polymers or polyimides tend to be unstable in the sense that during spin coating operations undesirable precipitate formation occurs on the rotating surface of the wafer. The result is the forma- tion of unacceptable coatings due to their irregularity and lack of uniformity. Described are compositions especially adapted for use in spin coating wafers of semiconductive materials, which comprise solutions of these polyamic acid or polyimide polymers in a solvent containing at least 10% of a cycloaliphatic ketone (e.g., cyclohexanone) or mixture of cycloaliphatic ketones, such that the solution (a) contains on a weight basis from 5% to 40% of the polyamic acid or from 5% to 50% of the polyimide, and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.

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