Conduction structure for infrared microbolometer sensors

Details Conduction structure for infrared microbolometer sensors Conduction structure for infrared microbolometer sensors

G - Physics

01

J

G01J 5/20 (2006.01)

Patent

CA 2666711

A conduction structure for infrared microbolometer sensors and a method for sensing electromagnetic radiation may be provided. The microbolometer may include a first conductor layer (64) and a second conductor layer (68). The microbolometer further may include a bolometer layer (62) between the first conductor layer and the second conductor layer.

L'invention porte sur une structure de conduction pour des détecteurs de microbolomètre infrarouge et sur un procédé de détection de rayonnement électromagnétique. Le microbolomètre peut comprendre une première couche de conducteur (64) et une seconde couche de conducteur (68). Le microbolomètre peut en outre comprendre une couche de bolomètre (62) entre la première couche de conducteur et la seconde couche de conducteur.

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